Research Article

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2016, 9(2): 424–434

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https://doi.org/10.1007/s12274-015-0923-7

Fabrication of flexible reduced graphene oxide/Fe2O3 hollow nanospheres based on-chip micro-supercapacitors for integrated photodetecting applications

Shaosong Gu1,2, Zheng Lou2, Ludong Li2, Zhaojun Chen3, Xiangdong Ma1 (*), and Guozhen Shen2 (*)

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1 Department of Material Science and Engineering, China University of Mining & Technology (Beijing), Beijing 100083, China
2 State Key Laboratory for Superlattices and Microstructures, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China
3 College of Chemical Science and Engineering, Qingdao University, Qingdao 266071, China

Keywords: Fe2O3, microsupercapacitor, photodetector, flexible
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ABSTRACT Micro-supercapacitors (MSCs) as important on-chip micropower sources have attracted considerable attention because of their unique and advantageous design for optimized maximum functionality within a minimized sized chip and excellent mechanical flexibility/stability in miniaturized portable electronic device applications. In this work, we report a novel, high-performance flexible integrated on-chip MSC based on hybrid nanostructures of reduced graphene oxide/Fe2O3 hollow nanospheres using a microelectronic photo-lithography technology combined with plasma etching technique. The unique structural design for on-chip MSCs enables high-performance enhancements compared with graphene-only devices, exhibiting high specific capacitances of 11.57 F·cm−3 at a scan rate of 200 mV·s−1 and excellent rate capability and robust cycling stability with capacitance retention of 92.08% after 32,000 charge/discharge cycles. Moreover, the on-chip MSCs exhibit superior flexibility and outstanding stability even after repetition of charge/discharge cycles under different bending states. As-fabricated highly flexible on-chip MSCs can be easily integrated with CdS nanowire-based photodetectors to form a highly compacted photodetecting system, exhibiting comparable performance to devices driven by conventional external energy storage units.
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Fabrication of flexible reduced graphene oxide/Fe2O3 hollow nanospheres based on-chip micro-supercapacitors for integrated photodetecting applications. Nano Res. 2016, 9(2): 424–434 https://doi.org/10.1007/s12274-015-0923-7

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