Research Article


2017, 10(5): 1804–1818


Scanning electron microscopy imaging of single-walled carbon nanotubes on substrates

Dongqi Li1, Jin Zhang1, Yujun He2,3, Yan Qin4, Yang Wei1 (*), Peng Liu1, Lina Zhang1, Jiaping Wang1,5, Qunqing Li1,5, Shoushan Fan1,5, and Kaili Jiang1,5 (*)

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1 State Key Laboratory of Low-Dimensional Quantum Physics, Department of Physics and Tsinghua-Foxconn Nanotechnology Research Center, Tsinghua University, Beijing 100084, China
2 Sunwoda Electronic Co. Ltd., Shenzhen 518108, China
3 Graduate School at Shenzhen, Tsinghua University, Shenzhen 518055, China
4 Carl Zeiss Shanghai Co., Ltd. Beijing Office, No. 1221, North Area, Building B, 768 Creative Industry Park, A-5 Xueyuan Rd., Haidian Dist., Beijing 100083, China
5 Collaborative Innovation Center of Quantum Matter, Beijing 100084, China

Keywords: single-walled carbon nanotube, scanning electron microscopy, imaging, surface charging
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  • Abstract
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ABSTRACT Scanning electron microscopy (SEM) plays an indispensable role in nanoscience and nanotechnology because of its high efficiency and high spatial resolution in characterizing nanomaterials. Recent progress indicates that the contrast arising from different conductivities or bandgaps can be observed in SEM images if single-walled carbon nanotubes (SWCNTs) are placed on a substrate. In this study, we use SWCNTs on different substrates as model systems to perform SEM imaging of nanomaterials. Substantial SEM observations are conducted at both high and low acceleration voltages, leading to a comprehensive understanding of the effects of the imaging parameters and substrates on the material and surface-charge signals, as well as the SEM imaging. This unified picture of SEM imaging not only furthers our understanding of SEM images of SWCNTs on a variety of substrates but also provides a basis for developing new imaging recipes for other important nanomaterials used in nanoelectronics and nanophotonics.
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Scanning electron microscopy imaging of single-walled carbon nanotubes on substrates. Nano Res. 2017, 10(5): 1804–1818

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