Review Article

|

2021, 14(9): 3010–3032

|

https://doi.org/10.1007/s12274-021-3440-x

Si nanomebranes: Material properties and applications

Arijit Sarkar, Yongjun Lee, and Jong-Hyun Ahn (✉)

View Author's information

School of Electrical and Electronic Engineering, Yonsei University, 50 Yonsei-ro, Seoul 03722, Republic of Korea

Keywords: Si nanomebranes, flexible electronics, bio-integrated electronics, Si optoelectronics, strain engineering
Full article PDF
Cite this article(Endnote)
Share this article
Metric

views: 191

Citations: 0

  • Abstract
  • References
Silicon (Si) has widely been used as an essential material in the modern semiconductor industry. Recently, new attempts have been actively made to apply Si to a variety of fields such as flexible electronic devices and biosensors by manufacturing Si nanomembranes (NMs) having nanometer thickness. In particular, as the thickness of Si is reduced to a nanometer scale, its mechanical, electrical, and optical properties differ from that of its bulk form, which provides opportunities for the development of new conceptual devices. In this review, we present recent advances in Si NM technology that exhibit functional features different from the bulk materials. In addition, we discuss the opportunities and current challenges related to this field.
Related Article
Cite this article

Si nanomebranes: Material properties and applications. Nano Res. 2021, 14(9): 3010–3032 https://doi.org/10.1007/s12274-021-3440-x

Download citation